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Proposal of High-Electron Mobility Transistors With Strained InN Channel

Identifieur interne : 002678 ( Main/Repository ); précédent : 002677; suivant : 002679

Proposal of High-Electron Mobility Transistors With Strained InN Channel

Auteurs : RBID : Pascal:11-0155524

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English descriptors

Abstract

By using a Schrödinger-Poisson equation solver, we calculate band diagrams of potentially record fast III-N high-electron mobility transistors (HEMTs), which are based on strained InN channels. Assuming cation polarity, pseudomorphic HEMT devices are proposed with a relaxed InAlN buffer layer having Al mole fraction in the range of 0.10-0.15 and with an InAlN barrier layer. Calculations indicate highly confined electrons in the channel with a density of 1.4-2 × 1013 cm-2 if the 5-10-nm-thick InN channel is separated from the barrier by < 0.8-nm-thick GaN spacer. Alternatively, for a nonpolar structure with an Al mole fraction of 0.3 in the InAlN buffer and for a doping 5 × 1019 cm-3 in the InAIN barrier, we calculate the InN channel carrier density of approximately 1.4 × 1013 cm-2. We propose to use high-k dielectrics to insulate the gate from the barrier for both of the transistor structures.

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<name sortKey="Georgakilas, Alexandros" uniqKey="Georgakilas A">Alexandros Georgakilas</name>
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<term>Charge carrier density</term>
<term>Doping</term>
<term>Gallium nitride</term>
<term>High electron mobility transistor</term>
<term>High k dielectric</term>
<term>Indium nitride</term>
<term>Poisson equation</term>
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<term>Quantum well</term>
<term>Schrödinger equation</term>
<term>Spacer</term>
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<term>Transistor mobilité électron élevée</term>
<term>Equation Schrödinger</term>
<term>Equation Poisson</term>
<term>Transistor pseudomorphique</term>
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<term>Nitrure d'indium</term>
<term>Couche tampon</term>
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<term>Puits quantique</term>
<term>8107S</term>
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<div type="abstract" xml:lang="en">By using a Schrödinger-Poisson equation solver, we calculate band diagrams of potentially record fast III-N high-electron mobility transistors (HEMTs), which are based on strained InN channels. Assuming cation polarity, pseudomorphic HEMT devices are proposed with a relaxed InAlN buffer layer having Al mole fraction in the range of 0.10-0.15 and with an InAlN barrier layer. Calculations indicate highly confined electrons in the channel with a density of 1.4-2 × 10
<sup>13</sup>
cm
<sup>-2</sup>
if the 5-10-nm-thick InN channel is separated from the barrier by < 0.8-nm-thick GaN spacer. Alternatively, for a nonpolar structure with an Al mole fraction of 0.3 in the InAlN buffer and for a doping 5 × 10
<sup>19</sup>
cm
<sup>-3</sup>
in the InAIN barrier, we calculate the InN channel carrier density of approximately 1.4 × 10
<sup>13</sup>
cm
<sup>-2</sup>
. We propose to use high-k dielectrics to insulate the gate from the barrier for both of the transistor structures.</div>
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<s0>By using a Schrödinger-Poisson equation solver, we calculate band diagrams of potentially record fast III-N high-electron mobility transistors (HEMTs), which are based on strained InN channels. Assuming cation polarity, pseudomorphic HEMT devices are proposed with a relaxed InAlN buffer layer having Al mole fraction in the range of 0.10-0.15 and with an InAlN barrier layer. Calculations indicate highly confined electrons in the channel with a density of 1.4-2 × 10
<sup>13</sup>
cm
<sup>-2</sup>
if the 5-10-nm-thick InN channel is separated from the barrier by < 0.8-nm-thick GaN spacer. Alternatively, for a nonpolar structure with an Al mole fraction of 0.3 in the InAlN buffer and for a doping 5 × 10
<sup>19</sup>
cm
<sup>-3</sup>
in the InAIN barrier, we calculate the InN channel carrier density of approximately 1.4 × 10
<sup>13</sup>
cm
<sup>-2</sup>
. We propose to use high-k dielectrics to insulate the gate from the barrier for both of the transistor structures.</s0>
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<s5>03</s5>
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<s5>06</s5>
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<s5>08</s5>
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<s5>08</s5>
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<s0>Concentración portador carga</s0>
<s5>08</s5>
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<s0>Nitrure d'indium</s0>
<s5>22</s5>
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<s0>Indium nitride</s0>
<s5>22</s5>
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<s0>Indio nitruro</s0>
<s5>22</s5>
</fC03>
<fC03 i1="10" i2="X" l="FRE">
<s0>Couche tampon</s0>
<s5>23</s5>
</fC03>
<fC03 i1="10" i2="X" l="ENG">
<s0>Buffer layer</s0>
<s5>23</s5>
</fC03>
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<s0>Capa tampón</s0>
<s5>23</s5>
</fC03>
<fC03 i1="11" i2="X" l="FRE">
<s0>Nitrure de gallium</s0>
<s5>24</s5>
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<s5>24</s5>
</fC03>
<fC03 i1="11" i2="X" l="SPA">
<s0>Galio nitruro</s0>
<s5>24</s5>
</fC03>
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<s0>Composé binaire</s0>
<s5>25</s5>
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<s0>Binary compound</s0>
<s5>25</s5>
</fC03>
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<s0>Compuesto binario</s0>
<s5>25</s5>
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<s0>Diélectrique permittivité élevée</s0>
<s5>26</s5>
</fC03>
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<s0>High k dielectric</s0>
<s5>26</s5>
</fC03>
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<s5>26</s5>
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<s5>27</s5>
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<s0>Quantum well</s0>
<s5>27</s5>
</fC03>
<fC03 i1="14" i2="X" l="SPA">
<s0>Pozo cuántico</s0>
<s5>27</s5>
</fC03>
<fC03 i1="15" i2="X" l="FRE">
<s0>8107S</s0>
<s4>INC</s4>
<s5>56</s5>
</fC03>
<fC03 i1="16" i2="X" l="FRE">
<s0>InN</s0>
<s4>INC</s4>
<s5>82</s5>
</fC03>
<fC03 i1="17" i2="X" l="FRE">
<s0>GaN</s0>
<s4>INC</s4>
<s5>83</s5>
</fC03>
<fC07 i1="01" i2="X" l="FRE">
<s0>Composé III-V</s0>
<s5>09</s5>
</fC07>
<fC07 i1="01" i2="X" l="ENG">
<s0>III-V compound</s0>
<s5>09</s5>
</fC07>
<fC07 i1="01" i2="X" l="SPA">
<s0>Compuesto III-V</s0>
<s5>09</s5>
</fC07>
<fN21>
<s1>101</s1>
</fN21>
<fN44 i1="01">
<s1>OTO</s1>
</fN44>
<fN82>
<s1>OTO</s1>
</fN82>
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